50-100mm compatible aligner SAL2241 series
We have achieved a reduced footprint with small-diameter wafer compatibility.
The SAL2241 series aligner, compatible with 50mm to 100mm wafers, is designed for transporting wafers that require positioning within semiconductor manufacturing equipment and inspection devices. It achieves a compact footprint while accommodating small-diameter wafers. It centers small-diameter wafers and positions orifices and notches with high speed and precision. A 0.1μm filter is equipped on the spindle side. The control method is via RS232C and parallel photo I/O. For more details, please contact us or refer to the catalog.
- Company：ジェーイーエル
- Price：Other
